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Equipment of Microelectronic Materials and Nanoanalysis

Fraunhofer Institute for Ceramic Technologies and Systems
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Atomic Force Acoustic Microscope (AFM/AFAM)

Manufacturer: Agilent Technologies
Model: 5600 LS
Facility: Microelectronic Materials and Nanoanalysis

 

Spectroscopic Ellipsometer

Manufacturer: SENTECH Instruments GmbH
Model: SE850
Facility: Microelectronic Materials and Nanoanalysis

 

X-ray Microscope (XRM)

Manufacturer: Xradia (now Carl Zeiss Ultra)
Model: NanoXCT-100
Facility: Microelectronic Materials and Nanoanalysis

 

Atomic Force Acoustic Microscope (AFM/AFAM)

Manufacturer: Digital Instruments/ in-house development
Model: Dimension 3000
Facility: Microelectronic Materials and Nanoanalysis

 

Nanoindenter

Manufacturer: Hysitron Inc.
Model: TriboIndenter ® TI 950
Facility: Microelectronic Materials and Nanoanalysis

 

REM / FIB

Manufacturer: Carl Zeiss SMT AG
Model: LEO 440
Facility: Microelectronic Materials and Nanoanalysis

 

Transmission Electron Microscope (TEM)

Manufacturer: Carl Zeiss AG
Model: LIBRA® 200 HR MC Cs STEM
Facility: Microelectronic Materials and Nanoanalysis

 

Röntgendiffraktometer XRD/XRR

Manufacturer: Firma Richard Seifert & Co. Ahrensburg (GE Inspection Technologies GmbH)
Model: XRD 3000PTS
Facility: Microelectronic Materials and Nanoanalysis

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