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Spectroscopic Ellipsometer SENTECH Instruments GmbH SE850

Basic Information

Name: Spectroscopic Ellipsometer
Manufacturer: SENTECH Instruments GmbH
Model: SE850
Facility: Microelectronic Materials and Nanoanalysis
Partner: Fraunhofer Institute for Ceramic Technologies and Systems (IKTS)

Description

Measure/Resolution:

  • 200 µm spot, 0.01 ° angular, 1/cm - 32/cm spectral
  • Spectral range 240 - 1700 nm

Link to Further Details

http://www.sentech.com

Points of Contact

Prof. Dr. Ehrenfried Zschech (Head of Department)
Phone:
+49 351 88815-543
Fax:
+49 351 88815-509

Notes

This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA).

Images

Last Update

Last updated at: 13 July 2017 at 11:54:12