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X-ray Microscope (XRM) Xradia (now Carl Zeiss Ultra) NanoXCT-100

Basic Information

Name: X-ray Microscope (XRM)
Manufacturer: Xradia (now Carl Zeiss Ultra)
Model: NanoXCT-100
Facility: Microelectronic Materials and Nanoanalysis
Partner: Fraunhofer Institute for Ceramic Technologies and Systems (IKTS)

Description

  • Resolution:       better than 50 nm
  • Tilt  range:        360 °
  • FOV (SR/HR ): 65 μm  / 16 μm Ø

Points of Contact

Prof. Dr. Ehrenfried Zschech (Head of Department)
Phone:
+49 351 88815-543
Fax:
+49 351 88815-509

Notes

This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA).

Images

Last Update

Last updated at: 13 July 2017 at 11:54:12