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2D / 3D Confocal Measuring System confovis GmbH ConfoDisc CL200/CL300

Basic Information

Name: 2D / 3D Confocal Measuring System
Manufacturer: confovis GmbH
Model: ConfoDisc CL200/CL300
Partner: Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden (IZM (ASSID))

Description

he confovis measuring system ConfoDisc CL200/CL300 based on the NIKON microskope L200 or L300 is particularly suitable for the detailed measurement of wafers in the semiconductor industry. As the smaller version, the wafer microscope systems supply razor-sharp details and precise measurements down to the nanometre range.

Link to Further Details

http://www.confovis.com/products/confodisc-cl200cl300.html

Points of Contact

M. J├╝rgen Wolf
Email:
Phone:
+49 351 795572-12
Fax:
+49 351 795572-19

Notes

This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA).

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Last Update

Last updated at: 13 July 2017 at 11:54:13