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Energy Dispersive X-Ray (EDX) Spectroscope Oxford Instruments INCA x-act

Basic Information

Name: Energy Dispersive X-Ray (EDX) Spectroscope
Manufacturer: Oxford Instruments
Model: INCA x-act
Partner: Fraunhofer Institute for Reliability and Microintegration - All Silicon System Integration Dresden (IZM (ASSID))

Description

Energy Dispersive Spectroscopy (EDS) Analysis provides elemental and chemical analysis of a sample inside the SEM, TEM or FIB.

Link to Further Details

http://www.oxford-instruments.com/products/microanalysis/energy-dispersive-x-ray-systems-eds-edx

Points of Contact

M. J├╝rgen Wolf
Email:
Phone:
+49 351 795572-12
Fax:
+49 351 795572-19

Notes

This is an instrument within the Dresden Fraunhofer Cluster Nanoanalysis (DFCNA).

Images

Last Update

Last updated at: 13 July 2017 at 11:54:13