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Multi-Beam Focused Ion Milling and Imaging System (SEM / FIB) JEOL GmbH JIB-4610F

Basic Information

Name: Multi-Beam Focused Ion Milling and Imaging System (SEM / FIB)
Manufacturer: JEOL GmbH
Model: JIB-4610F
Facility: Chair of Mechanics of Materials and Failure Analysis
Partner: Technische Universität Dresden (TUD)
Partner: Fraunhofer Institute for Material and Beam Technology (IWS)

Short Description

This system incorporates an easy-to-use, out-lens type scanning electron microscope (SEM) equipped with a Schottky electron gun and a new FIB column capable of large milling currents (90 nA)

Description

"High resolution and precision are now required for almost evaluation techniques, including crystal analysis, element mapping and morphology observations for increasingly complex processes and structural miniaturization for advanced materials. The JIB-4610F is a multibeam milling and imaging system developed to meet these needs with a single tool. This system incorporates an easy-to-use, out-lens type scanning electron microscope (SEM) equipped with a Schottky electron gun and a new FIB column capable of large milling currents (90 nA) into a single chamber.
After high-speed processing of the cross-section using FIB, it is possible to perform high-speed analysis using any of the various analysis units like CLD (cathodoluminescence), EBSD (crystal orientation analysis system) and EDS (energy dispersive X-ray spectrometry), making use of the high-resolution SEM imaging and the Schottky electron gun capable of providing large currents (200 nA).
The standard configuration includes a 3D analysis function, where milling of cross sections is performed automatically at fixed intervals, with SEM images acquired for each cross section (Cut&See). By also utilizing the optional 3D reconstruction software, it is possible to make even more detailed analyses of the 3 dimensional structures of a complex sample." [https://www.jeol.co.jp]

Link to Further Details

https://www.jeol.co.jp/en/news/detail/20150224.1047.html

Options of instrument usage

Points of Contact

Mrs. Prof. Dr. M. Zimmermann / Mrs. Carina Dimter (Sec.)
Email:
Phone:
+49 351 463 33332
Fax:
+49 351 463 37129

Images

Last Update

Last updated at: 20 November 2018 at 15:22:00