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Vertical in-line sputtering plant ILA 750

Basic Information

Name: Vertical in-line sputtering plant
Model: ILA 750
Partner: Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology (FEP)

Short Description

Vertical in-line coating plant for developing layer systems and technologies for the deposition of optical, electrical and decorative functional layers

Description

Vertical in-line coating plant for developing layer systems and technologies for the deposition of optical, electrical and decorative functional layers

Typical substrate

  • single-sided or two-sided coating of substrates made of metal, plastic, glass or ceramics with substrate dimensions up to 500 × 300 mm2 (maximum 600 × 400 mm2) and a maximum thickness of 60 mm

Range of applications

  • development and testing of technological components and key components for the deposition of metals and oxides under near- industrial conditions
  • development of optical, electrical, decorative functional layers and layer systems
  • coatings:
  • for special studies/tests
  • for marketing purposes
  • for samples for final customers
  • pilot production
  • evaluation of the economics of the processes

Link to Further Details

https://www.fep.fraunhofer.de/de/Leistungsangebot/Anlagentechnik/ila_750.html

Options of instrument usage

Points of Contact

Ines Schedwill
Email:
Phone:
+49 351 8823-238
Fax:
+49 351 8823-394

Images

Last Update

Last updated at: 14 February 2019 at 09:37:24