Center Nanoelectronic Technologies (CNT)Parent Units:
Fraunhofer Institute for Photonic Microsystems (IPMS)
German name: "Center Nanoelektronische Technologien (CNT)".
|phone:||+49 (0)351 2607-3040|
|fax:||+49 (0) 351 2607 3005|
|address:||Fraunhofer Institute for Photonic Microsystems (IPMS), Center Nanoelectronic Technologies (CNT), Königsbrücker Str. 178, 01099 Dresden, Germany|
|partner:||Fraunhofer Institute for Photonic Microsystems|
The business unit Center Nanoelectronic Technologies is focussing on the certification of processes and materials on 300 mm wafers. More than 40 tools and a clean room (ISO 14644-1 class 6) are available for the integration of customer processes and subnanometer characterization. CNT’s process modules are:
• High-k Devices,
• Cu-Metallization and
• Sub-nm Characterization and Verification.
Various synergy effects arise out of the close cooperation with business partners and our capabilities and know-how. Thus the innovations can be integrated quickly into the manufacturing process and the production costs and time can be reduced considerably.
|Fraunhofer Institute for Photonic Microsystems (IPMS)||Institute|
Last updated at: 2016-07-14 07:55